Turbine vacuum pump, also known as turbine molecular pump, is an oil-free high vacuum equipment based on the principle of momentum transfer. Its core lies in the synergistic effect of high-speed rotating moving blades and stationary blades, which transport gas molecules in a molecular flow state to the exhaust port in a directional manner, achieving a maximum vacuum environment of 10 ⁻¹¹ to 10 ⁻¹ Pa. This technology does not rely on oil seals, completely avoiding the risk of oil pollution, and is an irreplaceable choice for scenarios with strict cleanliness requirements such as semiconductor etching, mass spectrometry analysis, and vacuum coating.
In recent years, China has achieved key breakthroughs in this field. Beijing Zhongke Jiuwei applied for a patent for a new type of turbo molecular pump in March 2025. By optimizing the structure of the three-stage turbo rotor and spiral groove compression disc, the pumping speed and compression ratio are synchronously improved, while reducing manufacturing costs. This marks the transition of domestic high-end vacuum pumps from "usable" to "optimized". More noteworthy is that as the core undertaking unit of the national "02 Special Project", Zhongke Instrument has achieved the localization of the entire process chain of semiconductor grade dry vacuum pumps. In April 2026, it officially launched its listing on the Beijing Stock Exchange, becoming a landmark event in China's independent and controllable high-end vacuum equipment.
In terms of energy conservation and reliability, magnetic levitation turbine vacuum pumps have become a new benchmark in the industry. It adopts five degrees of freedom active magnetic levitation bearings to achieve non-contact suspension operation of the rotor, completely eliminating mechanical wear. Actual test data shows that in industrial dehydration scenarios such as papermaking and chemical industry, the power saving rate of a single equipment can reach 40% -45%, with an annual power saving of over one million kWh, noise level below 80 dB, and a stable operating life of over 20 years. Shandong Tianrui Heavy Industry, Zhanggu Gaofu and other enterprises' products have been operating stably in multiple large-scale projects for a long time, completely overturning the traditional "high energy consumption and high maintenance" mode of water ring pumps.
In Linyi, Shandong Province, although there is no exclusive agent for turbine vacuum pump brands, Linyi Tiancheng Pump Industry can provide multi brand agency and maintenance services, including Boshan Vacuum Pump. New Territories Pump Industry has a clear after-sales point on Beiyuan Road in Lanshan District (phone: 0539-8011328), which can serve as a hub for local technical support. When purchasing, it is recommended that users prioritize domestic models with magnetic levitation technology to reduce long-term operation and maintenance costs.
Special attention should be paid to the essential differences between turbo vacuum pumps and dry vortex pumps: the former is suitable for ultra-high vacuum, clean and oil-free environments (such as chip manufacturing), while the latter is used for medium and low vacuum, industrial dehydration scenarios (such as papermaking and sewage treatment). The pressure range, cleanliness level, and cost structure of the two are not interchangeable. In the high humidity and dusty industrial environment of Linyi, it is necessary to install HEPA grade filters (with a filtration efficiency of ≥ 99.97%) and gas-liquid separators at the intake end to prevent dust from blocking the flow channel and water vapor emulsified oil products, ensuring stable operation of the equipment.
